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Porous Silicon Micromachining Techniques for Accelerometer Fabrication , of both surface and bulk micromachining , the epitaxial layer as construction ....
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Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devic...
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